关键字导读: ETCH PVD PECVD MOCVD MEMS CMP COATING CLEAN DETECT TRACK
MIAOXIE: GAOGANJINGPINJI，GAOSUCHUANPIAN，PENGZHUANGYANHU，Mapping，SEMIRENZHENGS2，F47，FENGYINGTEXINGHUASHEXIANGSHOUZHIJIJIEKOUYONGHUKEDINGZHI。
简介
Introduction
OUHECHUANDONG、SIFUQUDONG、GANJINGCHUANDONGJIGUANGHUA、SCARASHOUBEIGUIHUA，JUBEIZHANYONGKONGJIANXIAO、DASHENSUOBI、GAOJINGDU、GAOGANJINGDUDENGZHANGCHU。FENGYINGTEXINGHUASHEXIANG，SHOUZHIJIJIEKOUYONGHUKEDINGZHI，SHOUJIHUAJIEZHITIXI，GAOSUCHUANPIANXIAOLIHEPENGZHUANGYANHUGONGXIAO，SEMIRENZHENGS2、F47，MCBFDAYU1000WANCI。DANRENSHIXIANJINGYUANZAIFOUP、HUANCHONGSHI、GONGYIWEIZHIDENGZHIJIANDEZHUDONGCHUANDI。SHIBANDAOTIXINGYEDEYOUSHENGZHITIAOXUAN。
参数
Parameter
| 规划情势Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
|---|---|---|
| 负载Payload | 称号name | 晶圆wafer |
| 直径diameter | Φ200mm/Φ300mm | |
| 分量weight | ≤0.5kg | |
| 自在度数DOF | 4 | |
| 手数目Number of Arm | 2 | |
| 最大反转展转直径Maximum Swing diameter | 520mm | |
HUODONGGUIMO Moving Range | 起落轴 (Z轴)Up/Down( Z)-Axis | 450mm |
| 反转展转轴 (T轴) Rotational(T)-Axis | 350° | |
| 舒展轴 (R轴) Extension(Z)-Axis | R760mm | |
ZUIDASULV Maximum Moving Speed | 起落轴 (Z轴)Up/Down( Z)-Axis | 375mm/s |
| 反转展转轴 (T轴) Rotational(T)-Axis | 360° | |
| 舒展轴 (R轴) Extension(Z)-Axis | 1100mm/s | |
FANFUDINGWEIJINGDU Repeatability | 起落轴 (Z轴)Up/Down( Z)-Axis | ±0.1 mm(3σ) |
| 反转展转轴 (T轴) Rotational(T)-Axis | ±0.01°(3σ) | |
| 舒展轴 (R轴) Extension(Z)-Axis | ±0.1 mm(3σ) | |
| 干净度Clean Class | CLASS 1 | |
| 主机分量Body Weight | 70 kg | |
| 电源Power Supply | VAC 220V±10% | |
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