关键字导读: TRACK ETCH PVD PECVD MOCVD MEMS CMP COATING CLEAN DETECT
MIAOXIE: GAOGANJINGPINJI，GAOJINGDU，GAOSUCHUANPIAN，NAIQINSHI，PENGZHUANGYANHU，MappingGONGXIAO，SEMIRENZHENG，GONGJIJIEKOUJIJIEWEIDINGZHI。
简介
Introduction
DAQIJIXIESHOUPUBIANYONGYUGUIJINGYUANHELEDLANBAOSHIJIPIANBANYUN。SHOUBEIJIENAJINBUQIANBEIDEGUIHUAZENGQIANGLESHOUBEIDEGANGXING，BINGYOUYONGANNAZHENDONG，QINGLIANGHUASHEXIANGZHIZUGAOSUQINGQIU。BENTIDEZHIZUOGONGYIGAILIANGYOUYONGXIAJIANGBENQIAN，JINSHENGSHICHANGHEZUOLI。CAILIAO、JIAGONGHEWAIBIAOCHUZHIDUOFANGMIANYOUXUAN，YIWANCHENGGAOGANJINGDU。JUBEIDUOZHONGNINGJINGYANHUGONGXIAO。ZHOUBUHEWANBUJIAOJIEJIEZHI，SHIDEJIXIERENNENGGOUJIENASIYIZISHILAIQUFANGJINGYUAN，XUKEGENGDUODEPIANHEZHIXIANPAIBU，GENGJIELIUKONGJIAN，SHUNYINGXINGGENGQIANG。SHIBANDAOTIXINGYEDESHANGFENGZHIXUAN。
参数
Parameter
| 规划情势Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
|---|---|---|
| 负载Payload | 称号name | 晶圆wafer |
| 直径diameter | Φ200mm/Φ300mm | |
| 分量weight | ≤0.5kg | |
| 自在度数DOF | 3 | |
| 最大反转展转直径Maximum Swing diameter | 520mm | |
HUODONGGUIMO Moving Range | 起落轴 (Z轴)Up/Down( Z)-Axis | 330mm |
| 反转展转轴 (T轴) Rotational(T)-Axis | 330° | |
| 舒展轴 (R轴) Extension(Z)-Axis | R736mm | |
ZUIDASULV Maximum Moving Speed | 起落轴 (Z轴)Up/Down( Z)-Axis | 330mm/s |
| 反转展转轴 (T轴) Rotational(T)-Axis | 360° | |
| 舒展轴 (R轴) Extension(Z)-Axis | 900mm/s | |
FANFUDINGWEIJINGDU Repeatability | 起落轴 (Z轴)Up/Down( Z)-Axis | ±0.1 mm(3σ) |
| 反转展转轴 (T轴) Rotational(T)-Axis | ±0.01°(3σ) | |
| 舒展轴 (R轴) Extension(Z)-Axis | ±0.1 mm(3σ) | |
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