注册就送68体验金

PINUS1-B

关键字导读: PECVD PVD ETCH MEMS

MIAOXIE: ZHIQUJIDIANGUIHUA,QUANXINDEIOMOKUAI,JUBEIJINBUQIANBEIDEFANGPENGZHUANGYANHUGONGXIAOJISHUCHUJINGQIDENGHAOZHIYINGJIANJIANDUANGONGXIAO,JUBEISEMIRENZHENG。ZHIZUTEZHENGHUASHEXIANGCHENGCHIYONGHUDINGZHI,SHOUBEIZHANGDUKEXUAN,KEWEIKEHUGONGJIJIEKOUJIJIEWEIDINGZHIBANSHI。

简介

Introduction

ZHIQUJIDIANGUIHUAJUBEIGENGGAODEZHENKONGTEZHENG,WAIBUGUIHUABUCHILUN,PIDAIDENGBUJIAN,TIXIYUNZHUANDEANWENXINGGENGHAO,KAODEZHUXINGGENGGAO。QUANXINDEIOMOKUAI,JUBEIGENGDUODESHUCHUSHUCHUYINJIAO,YONGHUNENGGOUANZHAOXUYAOSHEZHISHEBEIBAISHECHENGHUSUO,CHUANGANQIJIANCEDENGGONGXIAO。SHUCHUJINGQIDENGHAOZHIYINGJIANJIANDUANGONGXIAO,BIANLIKEHUSHEZHISHEBEIBAISHEAWCDENGWEIZHISUOCUNGONGXIAOLIYONG。DAIYOUNINGJINGQUSHEZHISHEBEIBAISHEGONGXIAOHEHUOLUODEPENGZHUANGYANHUGONGXIAO,JIANHANYONGHUWUCAOZONGZHISHIDEGELEISANGSHI。DAIYOUDAPINGMUJIXIERENSHIJIAOQI,BIANLIDIAOSHIZHIYUANLIYONG,BINGCHENGCHIRECHABAGONGXIAO。NENGGOUANZHAOKEHULIYONGDETEBIEQINGQIU,DINGZHISHOUBEICHICUN,ZZHOULUCHENG,NAIDIWENNAIQINSHITEZHENGDENG。


更多概略,请单击新松干净产物资料库

参数

Parameter


本体分量Body Weight50KG
合用晶圆尺寸Wafer Size300mm/200mm/150mm/125mm/100mm
负载Payload1KG
电源输出Power SupplyAC电压:100-240V    AC频次: 50HZ/60HZ
节奏Bear4s-8.1s(Pick,Rotate180°,Place,按照手指资料,传输位置差别相干)
静态误差改正精度(AWC)±0.1mm
反复定位精度RepeatabilityZ: ±0.05mm(3σ)
T: ±0.003°(3σ)
R: ±0.05mm(3σ)
漏率Leak rate<  1 x 10E-9 std. cc/sec He
真空度Base Pressure5X10-9Torr

HEYONGWENDU Applicable  temperature

法兰:<120℃;本体:<50℃;手臂:<120℃

GANJINGDUClean Class

ISO  CLASS1

MCBF

>1100million cycles

FUHEHUODONG Compound  motion

撑持Support
PC长途操纵软件撑持Support
通讯接口Communications

Ethernet/CHUANKOUserial interface

IO互锁IO interlock

CHENGCHISupport

宁静区Safe area

CHENGCHISupport

PENGZHUANGYANHUCollision  protection

CHENGCHISupport



返回注册就送68体验金首页

金莎娱城乐手机版 金莎娱城乐网址 金莎娱乐场所app 电子游戏平台 电子游戏平台注册 金莎手机版网站 金莎娱乐app 金莎娱场客户端 金莎国际唯一官网手机 金莎app送30元彩金