关键字导读: ETCH PVD PECVD MOCVD MEMS
MIAOXIE: JIENACILIUTIMIFENGJISHU,SHOUJIHUAJIEZHITIXI,JUBEIJINBUQIANBEIDEFANGPENGZHUANGYANHUGONGXIAOJIJINGTAIJIUPIANGONGXIAO,JUBEISEMIRENZHENG,MCBFDAYU1000WANCI,TONGSHIJUBEICHAOGAOGANJINGDU,NAIDIWEN、NAIQINSHI,FUZAICAINENGQIANGDENGTESE。ZHIZUTEXINGHUASHEXIANGCHENGCHIYONGHUDINGZHI,FUZAI、SHOUBEIZHANGDUKEXUAN,KEWEIKEHUGONGJIJIEKOUJIJIEWEIDINGZHIBANSHI。SHIDAFUZAIZHENKONGJIXIESHOUDEYOUSHENGZHIXUAN。
Introduction
DAFUZAIZHENKONGJIXIESHOU, LEDXINPIANZHIZUOFANCHOUDEZHENKONGJIXIESHOUCHANWU,SHOUYAOYONGYULEDXINPIANZHIZUOJINCHENGZHONG,WANCHENGZHUANGYOUDAPILEDJINGYUANDETUOPANZAIGEGEGONGYIQIANGSHIJIANDECHUANDI,JUBEIZHENKONGDUGAO,FUZAIDA,CHUANSHUXIAOLIGAO,NAIDIWENDENGTESE,DADAJINBULELEDXINPIANCHUCHANZHIZUODELIANGLVHEXIAOLI,SHILEDXINPIANZHIZUOSHEBEIDEGUANJIANCHANWU。CHUANTONGDELEDXINPIANZHIZUOJIENAJICHENGDIANLUZHIZUOZHICHENGLIYONGDEZHENKONGJIXIESHOU,QIFUZAICAINENGZHIYAO1kg。BENCHANWUZAIJICHENGDIANLUZHIZUOYONGZHENKONGJIXIESHOUDEGENBENSHANG,ZHENDUIQIDAFUZAIXUYAO,LIYILEQICHUANSHUGUIHUAHEJIEZHIJILV,SHIQIKEYIHUOXUDAODA20.5kgDEFUZAICAINENG,TONGSHIJIANCHIHENXIAODEZHANYONGTIJI,JIANCHIGAONAIZHENKONGDUJIGANJINGPINJI。
Parameter
规划情势Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
---|---|---|
驱动体例Driving method | 伺服机电Servo Motor | |
手数目Number of Arm | 单臂Single Arm | |
负载Payload | 称号name | 托盘Tray |
直径diameter | Φ710mm | |
分量weight | ≤10.5kg | |
自在度数DOF | 3 | |
手臂长度Arm Length | 355mm | |
SHOUZHIZHANGDU(ZHUANGZHIZHONGJIANZHIGUIPIANZHONGJIAN) Finger length(distance from install center to wafer center) | 765mm | |
HUODONGGUIMO Moving Range | Z轴Z-axis | 150mm |
R轴,机械手扭转中间至工艺腔中间 R-axis, robot center to process chamber center | 极限(Ultimate)1440mm | |
θ轴θ-axis | 无穷反转展转Infinite Rotation | |
QUANLUCHENGZUIXIAOSHIHOU Minimum running time | Z轴Z-axis | 1s/35mm |
R轴R-axis | 5s/伸出或缩回Extend or Retraction | |
θ轴θ-axis | 5s/180° | |
FANFUDINGWEIJINGDU Repeatability | θ轴(°)θ-Axis | ±0.01(3σ) |
R轴(mm)R-Axis | ±0.1(3σ) | |
JIXIESHOUDAIφ710mmFUZAIHOUZUIXIAOFANZHUANZHANZHUANZHIJING Robot minimum turning diameter with Φ 710 mm load | 1530mm | |
SHENCHU1440mmFUZAIZHIJING710mmZUIQIANDUANXIACHUILIANG The front sag of robot which out of 1440mm with Φ 710 mm load | 5.5mm | |
反复定位精度Repeatability | ±0.2mm | |
耐真空度Base Pressure (Pa) | 10-6Pa | |
分量Weight | 机械抄本体Main-body | 100kg |
节制器Controller | 15kg | |
碰撞掩护Collision Protect Function | 盘片和机械手无毁伤/工位需从头校准 |