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SRBZ1440A

关键字导读: ETCH PVD PECVD MOCVD MEMS

MIAOXIE: JIENACILIUTIMIFENGJISHU,SHOUJIHUAJIEZHITIXI,JUBEIJINBUQIANBEIDEFANGPENGZHUANGYANHUGONGXIAOJIJINGTAIJIUPIANGONGXIAO,JUBEISEMIRENZHENG,MCBFDAYU1000WANCI,TONGSHIJUBEICHAOGAOGANJINGDU,NAIDIWEN、NAIQINSHI,FUZAICAINENGQIANGDENGTESE。ZHIZUTEXINGHUASHEXIANGCHENGCHIYONGHUDINGZHI,FUZAI、SHOUBEIZHANGDUKEXUAN,KEWEIKEHUGONGJIJIEKOUJIJIEWEIDINGZHIBANSHI。SHIDAFUZAIZHENKONGJIXIESHOUDEYOUSHENGZHIXUAN。

简介

Introduction

DAFUZAIZHENKONGJIXIESHOU, LEDXINPIANZHIZUOFANCHOUDEZHENKONGJIXIESHOUCHANWU,SHOUYAOYONGYULEDXINPIANZHIZUOJINCHENGZHONG,WANCHENGZHUANGYOUDAPILEDJINGYUANDETUOPANZAIGEGEGONGYIQIANGSHIJIANDECHUANDI,JUBEIZHENKONGDUGAO,FUZAIDA,CHUANSHUXIAOLIGAO,NAIDIWENDENGTESE,DADAJINBULELEDXINPIANCHUCHANZHIZUODELIANGLVHEXIAOLI,SHILEDXINPIANZHIZUOSHEBEIDEGUANJIANCHANWU。CHUANTONGDELEDXINPIANZHIZUOJIENAJICHENGDIANLUZHIZUOZHICHENGLIYONGDEZHENKONGJIXIESHOU,QIFUZAICAINENGZHIYAO1kg。BENCHANWUZAIJICHENGDIANLUZHIZUOYONGZHENKONGJIXIESHOUDEGENBENSHANG,ZHENDUIQIDAFUZAIXUYAO,LIYILEQICHUANSHUGUIHUAHEJIEZHIJILV,SHIQIKEYIHUOXUDAODA20.5kgDEFUZAICAINENG,TONGSHIJIANCHIHENXIAODEZHANYONGTIJI,JIANCHIGAONAIZHENKONGDUJIGANJINGPINJI。


更多概略,请单击新松干净产物材料库

参数

Parameter


规划情势Mechanical Structure柱坐标型/SCARA型 Cylindrical Coordinate/SCARA
驱动体例Driving method伺服机电Servo Motor
手数目Number of Arm单臂Single Arm
负载Payload称号name托盘Tray
直径diameterΦ710mm
分量weight≤10.5kg
自在度数DOF3
手臂长度Arm Length355mm

SHOUZHIZHANGDU(ZHUANGZHIZHONGJIANZHIGUIPIANZHONGJIAN)

Finger  length(distance from install center to wafer center)
765mm

HUODONGGUIMO

Moving  Range
Z轴Z-axis

150mm

R轴,机械手扭转中间至工艺腔中间 R-axis, robot center to process chamber center极限(Ultimate)1440mm
θ轴θ-axis无穷反转展转Infinite Rotation

QUANLUCHENGZUIXIAOSHIHOU

Minimum running time
Z轴Z-axis1s/35mm
R轴R-axis5s/伸出或缩回Extend or Retraction
θ轴θ-axis5s/180°

FANFUDINGWEIJINGDU

Repeatability
θ轴(°)θ-Axis±0.01(3σ)
R轴(mm)R-Axis±0.1(3σ)

JIXIESHOUDAIφ710mmFUZAIHOUZUIXIAOFANZHUANZHANZHUANZHIJING

Robot  minimum turning diameter with Φ 710 mm load
1530mm

SHENCHU1440mmFUZAIZHIJING710mmZUIQIANDUANXIACHUILIANG

The  front sag of robot which out of 1440mm with Φ 710 mm load
5.5mm
反复定位精度Repeatability±0.2mm
耐真空度Base Pressure (Pa)10­-6Pa
分量Weight机械抄本体Main-body100kg
节制器Controller15kg
碰撞掩护Collision Protect Function

盘片和机械手无毁伤/工位需从头校准
             Disc  and robot without damage/need  to recalibrate position



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