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SRBZ820C-SMSX

关键字导读: ETCH PVD PECVD MOCVD MEMS

MIAOXIE: CILIUTIMIFENG、SHOUJIHUAJIEZHIQI、MCBFDAYU1000WANCI,SEMIRENZHENGS2,F47,FENGYINGTEXINGHUASHEXIANGJUBEISHOUBEIZHANGDU、ZIZAIDUKEXUAN,SHOUZHIJIJIEKOUYONGHUKEDINGZHIDETESE,NAIDIWEN、NAIQINSHI,JINGTAIJIUPIANHEPENGZHUANGYANHUGONGXIAO。

简介

Introduction

JIENAQIANJINQIANBEIDEZHIQUJIDIANQUDONGJISHU,JUBEILEYINXIAO、ZHENDONGXIAO、YUNZHUANANWEN、JINGDUGAODANGTESE。JUBEIGENGHUOLUODEPENGZHUANGYANHUGONGXIAO,YOUYONGYANHUJIXIESHOUHEKEHUJINGYUAN。QUANXINDEGUIJIJIHUA,QIANJINHUODONGJIEZOU,QIANJINLEYONGHUCHANNENG。NINGJINGQUYANHUDENGGONGXIAOYOUYONGDIQIANJINLECHANWUDENINGJINGPINJI。ZAIBANDAOTIQIANDAOGAODUANSHEBEIZHONGPUBIANLIYONG,DUISHEBEIKAODEZHUXINGQINGQIUGAO。JIAOJIEDEBENDIHUA、KEDINGZHIHUABANSHI,JISUHUYINGDESHOUHOUBANSHI,HEAIZHUANGDEJISHUQILI,SHIZANMENDESHOUYAOHEZUOLI。BIANCELEGUOJIBANDAOTICAICHANLIANDEQIANJIN,YOUYONGDEZHICHILEGUOJISHEBEISHANGDESHENGZHANG。


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参数

Parameter


规划情势Mechanical Structure柱坐标型/SCARA型 Cylindrical Coordinate/SCARA
密封体例Seal way磁流体密封Ferro-Fluidic Sealing
自在度数DOF2
负载Payload称号name托盘Tray
直径diameterΦ370mm
分量weight2.5kg

ZUIDAHUODONGGUIMO

Moving  Range
R轴(mm)R-Axis

LIZHUZHONGJIANZHIRZHOUZUIDASHUZHANCHUBEIBANYUNWUTIZHONGJIANJIANGE820

Distance  from pillar center to  the moving objects  center of the biggest R-axis stretching is R820mm
θ轴(°)θ-Axis

QUANLUCHENGZUIXIAOSHIHOU

Minimum running time
R轴(s)R-Axis2.5
θ轴(s)θ-Axis3.5

FANFUDINGWEIJINGDU

Repeatability
θ轴(°)θ-Axis±0.01(3σ)
R轴(mm)R-Axis±0.1(3σ)
分量Weight机械抄本体Main-body41kg
节制器Controller15kg
耐真空度Base Pressure (Pa)10­-5Pa
漏率leak rate<1*10E-8Mbar*L/s
碰撞掩护Collision Protect Function盘片和机械手无毁伤Disc and robot without damage



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