关键字导读: ETCH PVD PECVD MOCVD MEMS
MIAOXIE: CILIUTIMIFENG、SHOUJIHUAJIEZHIQI、MCBFDAYU1000WANCI，SEMIRENZHENGS2，F47，FENGYINGTEXINGHUASHEXIANGJUBEISHOUBEIZHANGDU、ZIZAIDUKEXUAN，SHOUZHIJIJIEKOUYONGHUKEDINGZHIDETESE，NAIDIWEN、NAIQINSHI，JINGTAIJIUPIANHEPENGZHUANGYANHUGONGXIAO。
Introduction
JIENAQIANJINQIANBEIDEZHIQUJIDIANQUDONGJISHU，JUBEILEYINXIAO、ZHENDONGXIAO、YUNZHUANANWEN、JINGDUGAODANGTESE。JUBEIGENGHUOLUODEPENGZHUANGYANHUGONGXIAO，YOUYONGYANHUJIXIESHOUHEKEHUJINGYUAN。QUANXINDEGUIJIJIHUA，QIANJINHUODONGJIEZOU，QIANJINLEYONGHUCHANNENG。NINGJINGQUYANHUDENGGONGXIAOYOUYONGDIQIANJINLECHANWUDENINGJINGPINJI。ZAIBANDAOTIQIANDAOGAODUANSHEBEIZHONGPUBIANLIYONG，DUISHEBEIKAODEZHUXINGQINGQIUGAO。JIAOJIEDEBENDIHUA、KEDINGZHIHUABANSHI，JISUHUYINGDESHOUHOUBANSHI，HEAIZHUANGDEJISHUQILI，SHIZANMENDESHOUYAOHEZUOLI。BIANCELEGUOJIBANDAOTICAICHANLIANDEQIANJIN，YOUYONGDEZHICHILEGUOJISHEBEISHANGDESHENGZHANG。
Parameter
| 规划情势Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
|---|---|---|
| 密封体例Seal way | 磁流体密封Ferro-Fluidic Sealing | |
| 自在度数DOF | 2 | |
| 负载Payload | 称号name | 托盘Tray |
| 直径diameter | Φ370mm | |
| 分量weight | 2.5kg | |
ZUIDAHUODONGGUIMO Moving Range | R轴（mm）R-Axis | LIZHUZHONGJIANZHIRZHOUZUIDASHUZHANCHUBEIBANYUNWUTIZHONGJIANJIANGE820 Distance from pillar center to the moving objects center of the biggest R-axis stretching is R820mm |
| θ轴（°）θ-Axis | ||
QUANLUCHENGZUIXIAOSHIHOU Minimum running time | R轴（s）R-Axis | 2.5 |
| θ轴（s）θ-Axis | 3.5 | |
FANFUDINGWEIJINGDU Repeatability | θ轴（°）θ-Axis | ±0.01（3σ） |
| R轴（mm）R-Axis | ±0.1（3σ） | |
| 分量Weight | 机械抄本体Main-body | 41kg |
| 节制器Controller | 15kg | |
| 耐真空度Base Pressure (Pa) | 10-5Pa | |
| 漏率leak rate | <1*10E-8Mbar*L/s | |
| 碰撞掩护Collision Protect Function | 盘片和机械手无毁伤Disc and robot without damage | |
